Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
- /
- Pages.436-437
- /
- 2005
A Study on the surface and analysis of phase map using optical interferometer
광 간섭계를 이용한 표면 및 위상지도 분석에 관한 연구
- Park, June-Do (Honam Univ.) ;
- Shin, Soo-Yong (Honam Univ.) ;
- HwangBo, Seung (Honam Univ.) ;
- Kang, Yong-Chel (Honam Univ.)
- Published : 2005.07.07
Abstract
3-dimension object's feature measurement is used several industrial field to produce for examination of demanded high quality products by using optical measurement method. 3-dimension object's feature measurement is separated surface scanning and surface non-scanning. In this research, we illuminated interfero-pattern to object, it was constructed with Michelson interferometer by using laser is one of surface non-scanning method. And we extracted phase-map, it is one of featural measurement analysis of 3-dimensional object by using a phase shifting theory.