Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
- /
- Pages.50-50
- /
- 2005
Effect of pH, Molecular Weight, and Concentration of Surfactant in Nano-Ceria Slurry on STI-CMP
STI-CMP에서 나노 세리아 슬러리에 첨가되는 계면 활성제의 농도, pH, 분자량의 영향
- Lee, Jae-Seong (Department of Electronics and Computer Engineering, Hanyang University, Nano-SOI Process Laboratory, Hanyang University) ;
- Chun, Jin-Hwan (Department of Electronics and Computer Engineering, Hanyang University, Nano-SOI Process Laboratory, Hanyang University) ;
- Lee, Myung-Yoon (Nano-SOI Process Laboratory, Hanyang University) ;
-
Park, Jea-Gun
(Nano-SOI Process Laboratory, Hanyang University)
- Published : 2005.05.26
Abstract
Keywords