Modified Sliding Mode Control for Ultra-precision Positioning System

나노급 초정밀 위치결정 시스템에 대한 슬라이딩 모드 제어기 설계

In this paper, we design a new controller for an ultra-precision positioning system. In general, time optimal control enables to reach a target position faster than others. However it shows a weakness to chattering effect. In order to solve the problem, a new control algorithm based on sliding mode control is proposed. The suggested controller is composed of LQR control and sliding mode control. By performing some simulations, we prove that the proposed controller is more robust than time optimal control under the circumstance of parameter uncertainties and external disturbances.