Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2006.10a
  • /
  • Pages.505-506
  • /
  • 2006
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

A Numerical Analysis on the Behavior of Secondary Electrons and Optimal Mounting Position of a Secondary Electron Detector in SEM

SEM에서 수치해석을 통한 이차전자 거동해석 및 검출기의 최적위치 선정

  • Kim, Ji-Won (Dept. of Mech. and Automotive Eng., Graduate School, Univ. of Ulsan) ;
  • Jeon, Jong-Up (School of Mech. and Automotive Eng., Univ. of Ulsan) ;
  • Boo, Kyeung-Seok (Dept. of Mech. and Automotive Eng., Graduate School, Univ. of Ulsan) ;
  • Alexey-Deson, Ten (Dept. of Mech. and Automotive Eng., Graduate School, Univ. of Ulsan) ;
  • Park, Kyu-Yeol (School of Mech. and Automotive Eng., Univ. of Ulsan)
  • 김지원 (울산대학교 대학원 기계자동차공학과) ;
  • 전종업 (울산대학교 기계자동차공학부) ;
  • 부경석 (울산대학교 대학원 기계자동차공학과) ;
  • ;
  • 박규열 (울산대학교 기계자동차공학부)
  • Published : 2006.10.18
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Abstract

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