Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.10a
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- Pages.671-672
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- 2006
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- 2005-8446(pISSN)
An Ultra Precision Stage Using a Parallel Compliant Mechanism for 2-axis Linear Motion
병렬형 2 축 선형운동용 컴플라이언트 메커니즘에 의한 초정밀 스테이지
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Choi, K.B.
(Intelligent and Precision Machinery Research Division, Korea Institute of Machinery and Materials)
;
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Lee, J.J.
(Intelligent and Precision Machinery Research Division, Korea Institute of Machinery and Materials)
- Published : 2006.10.18
Abstract
Keywords
- parallel mechanism;
- linear motion;
- flexure;
- compliant mechanism;
- precision stage;
- piezoelectric element