Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.10a
- /
- Pages.65-65
- /
- 2006
A Study on the characteristics of TiZrAlN nanocomposite thin films synthesized by CFUBMS
-
Kim, Youn-J.
(Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
;
- Lee, Ho-Y. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Byun, Tae-J. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Kim, Kab-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2006.10.19
Abstract
Keywords