Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.04a
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- Pages.22-22
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- 2006
Deposition Characteristic of Transparent Conductive Films (AZO, GZO) by Magnetron Sputtering
마그네트론 스퍼터링법을 이용한 투명전도성박막(AZO, GZO)의 성막특성
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