Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.04a
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- Pages.23-23
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- 2006
Preferred Orientation and Surface Morphology of RF Sputtered ITO Thin Films: Effect of Oxygen Partial Pressure
RF Sputtering에 의해 증착된 ITO 박막의 우선배향성 및 표면형상 조절: 산소분압효과
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