Structure and mechanical properties of nanostructured thin films by CFUBMS

  • Kim Youn-J. (Center for Advanced Plasma Surface Technology SungKyunKwan University) ;
  • Lee Ho-Y. (Center for Advanced Plasma Surface Technology SungKyunKwan University) ;
  • Kim Yong-M. (Center for Advanced Plasma Surface Technology SungKyunKwan University) ;
  • Han Jeon-G. (Center for Advanced Plasma Surface Technology SungKyunKwan University)
  • Published : 2006.04.01