The effect of $Ar+H_2$ plasma of the low temperature ITO film synthesis of polymer

  • Moon Chang-S. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
  • Chung Yun-M. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
  • Gaillard M. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
  • Han Jeon-G. (Center for Advanced Plasma Surface Technology, SungKyunKwan University)
  • Published : 2006.04.01