Vibration experiment of precision stage that use laser vibrator

비접촉식 진동측정 장치를 이용한 정밀 스테이지의 진동특성 평가시험

In this study, a new modal test method is presented to evaluate vibration characteristic of the nano imprint stage system. Since it is difficult to measure vibration level without contacting the machine component, non contacting modal test method, laser scanning system is ultrared. Finite element analysis results are compared with the modal test results.