Improved sensitivity of surface acoustic wave gas sensor by using polyurethane absorption layer

폴리우레탄 감지막에 의한 표면탄성파 가스 센서의 감지능 향상

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring phase shift of output signal. A delay-line with a center frequency of 400MHz was fabricated on 128o Y-Z $LiNbO_3$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films are greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.