Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Investigation of IZO/Al multilayer anode grown on PEN substrate by a twin target sputtering system for flexible top emitting organic light emitting diodes

TTS를 이용하여 PEN 기판 상에 성막한 플렉시블 전면 발광 OLED용 IZO/Al multilayer 애노드의 특성

  • Oh, Jin-Young (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT)) ;
  • Moon, Jong-Min (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT)) ;
  • Jeong, Jin-A (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT)) ;
  • Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT))
  • 오진영 (금오공과대학교, 정보나노소재공학) ;
  • 문종민 (금오공과대학교, 정보나노소재공학) ;
  • 정진아 (금오공과대학교, 정보나노소재공학) ;
  • 김한기 (금오공과대학교, 정보나노소재공학)
  • Published : 2007.11.01
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Abstract

IZO/Al multilayer anode films for flexible top emitting organic light emitting diodes (TOLEDs) were grown on PEN (polyethylen-enaphthelate) substrate using twin target sputter (TTS) system. To investigate electrical and optical properties of IZO/Al multilayer films, 4-point probe method and UV/Vis spectrometer were used, respectively. From a IZO/Al multilayer films with 100nm-thick Al, sheet resistance of $1.4{\Omega}/{\square}$ and reflectance of above 62% at a range of 500~550nm wavelength could be obtained, In addition, structural and surface properties of IZO/Al multilayer films were analyzed by XRD (X-ray diffraction) and FESEM (field emission scanning electron microscopy) and AES (auger electron spectroscope), respectively. Moreover, flexibility of IZO/Al multilayer anode films were examined by bending test method.

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