한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
권호 표지

In-line Automatic defect inspection and repair method for TFT-LCD production

  • Honoki, Hideyuki (Production Engineering Research Laboratory Hitachi Ltd.) ;
  • Arai, T. (Production Engineering Research Laboratory Hitachi Ltd.) ;
  • Edamura, T. (Production Engineering Research Laboratory Hitachi Ltd.) ;
  • Yoshimura, K. (Production Engineering Research Laboratory Hitachi Ltd.) ;
  • Nakasu, N. (Production Engineering Research Laboratory Hitachi Ltd.)
  • Published : 2007.08.27
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Abstract

We have developed an automated circuit defect inspection and repair method that can be used to improve the yield ratio of TFT-LCD. The method focuses on correcting resist patterns after the development process to ensure shape regularity. We built a prototype system and confirmed that the method is valid.

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