한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Formation of Buffer Layer on Mica for Application to Flexible Thin Film Transistors

  • Oh, Joon-Seok (Dept. of Materials Science and Engineering, KAIST) ;
  • Lee, Seung-Ryul (Dept. of Materials Science and Engineering, KAIST) ;
  • Lee, Jin-Ho (Electronics and Telecommunications Research Institute) ;
  • Ahn, Byung-Tae (Dept. of Materials Science and Engineering, KAIST)
  • Published : 2007.08.27
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Abstract

A buffer layer consisting of $SiO_x/Ta/Ti$ has been developed in order to overcome the adhesion and stress problems between poly-Si film and mica. Polycrystalline silicon thin film transistor was successfully fabricated on the mica and transferred to a flexible plastic substrate.

Keywords