한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Effect of Fe Catalyst on Growth of Carbon Nanotubes by thermal CVD

  • Yoon, Seung-Il (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Heo, Sung-Taek (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Kim, Sam-Soo (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Lee, Yang-Kyu (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Lee, Dong-Gu (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
  • Published : 2007.08.27
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Abstract

The properties of carbon nanotube obtained by thermal chemical vapor deposition (CVD) process were investigated as a function of ammonia $(NH_3)$ gas in hydrocarbon gas, Fe catalyst thickness, and growth temperature. Fe catalyst was prepared by DC magnetron sputter and pre-treated with ammonia gas. CNTs were then grown with ammonia-acetylene gas mixture by thermal CVD. The diameter of these CNTs shows a strong correlation with the gas rate, the catalyst film thickness and temperature. From our results, it was found that the factors of grown CNTs positively acted to improve CNT quality.

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