한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Synthesis of Carbon Nanotubes by Using Inductively Coupled Plasma Chemical Vapor Deposition at Low Temperature

  • Kim, Young-Rae (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
  • Jang, In-Goo (Dept. of Electronics Engineering, Sejong University) ;
  • Cho, Hyun-Jin (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
  • Jeon, Hong-Jun (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
  • Cho, Jung-Keun (Research Center, System Engineering Mega Solution) ;
  • Hwang, Ho-Soo (Research Center, System Engineering Mega Solution) ;
  • Kong, Byung-Yun (Research Center, System Engineering Mega Solution) ;
  • Lee, Nae-Sung (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University)
  • Published : 2007.08.27
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Abstract

Carbon nanotubes (CNTs) were synthesized by inductively coupled plasma CVD at $450^{\circ}C$. CNTs were grown on the 1-nm-thick Fe-Ni-Co with $C_2H_2$ and $H_2$ at different pressures and plasma powers. CNTs were grown longer in height as the $H_{\alpha}/CH$ ratios became lower by decreasing plasma powers and increasing growth pressures.

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