한국정보디스플레이학회:학술대회논문집
- 2007.08a
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- Pages.933-936
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- 2007
Development of Internal linear Inductively Coupled Plasma Sources for Large Area Flat Penal Display Processing
- Lim, Jong-Hyeuk (Department of Materials Science and Engineering, Sungkyunkwan University) ;
- Park, Jung-Kyun (Department of Materials Science and Engineering, Sungkyunkwan University) ;
- Kim, Kyong-Nam (Department of Materials Science and Engineering, Sungkyunkwan University) ;
- Yeom, Geun-Young (Department of Materials Science and Engineering, Sungkyunkwan University)
- Published : 2007.08.27
Abstract
An inductively coupled plasma source with internaltype linear inductive antennas named as "multiple Utype antenna" was developed for the substrate size of
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