한국정보디스플레이학회:학술대회논문집
- 2007.08a
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- Pages.1049-1052
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- 2007
Low Work Function and Sharp Field Emitter Arrays by Transfer Mold Fabrication Method
- Nakamoto, Masayuki (Research Institute of Electronics, Shizuoka University) ;
- Sato, Genta (Research Institute of Electronics, Shizuoka University) ;
- Shiratori, Kohji (Research Institute of Electronics, Shizuoka University)
- Published : 2007.08.27
Abstract
Extremely sharp and uniform Transfer Mold FEAs with thin film low work function TiN emitter material have been fabricated by controlling the thickness of the coated emitter materials to realize high efficient, high reliable and low-cost vacuum nanoelectronic devices..Their tip radii are 8.3-13.8 nm. Turn-on electric fields of the Ni FEAs and TiN-FEAs resulted in the low electric field values of