Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Electric conduction mechanism Analysis of AW Thin Films using XPS Measurement

XPS 분석에 의한 AZO 박막의 전기전도 메커니즘 해석

  • Jin, Eun-Mi (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
  • Kim, Kyeong-Min (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
  • Park, Choon-Bae (Wonkwang Univ. School of Electrical Electronic and Information Engineering)
  • 진은미 (원광대학교 전기전자 및 정보공학부) ;
  • 김경민 (원광대학교 전기전자 및 정보공학부) ;
  • 박춘배 (원광대학교 전기전자 및 정보공학부)
  • Published : 2007.06.21
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Abstract

Aluminisum-doped zinc oxide (AZO) films are attractive materials as transparent conductive electrode because they are inexpensive, nontoxic and abundant element compared with indium tin oxide (ITO). In our paper, AZO films have been deposited on glass (coming 1737) substrates by RF magnetron sputtering. The AZO film was post-annealed at $600^{\circ}C$, $800^{\circ}C$ for 2 hr with $N_2$ atmosphere, respectively. We investigated that the electric properties and qualitative analysis of AZO films, which measured using the methods of Hall effect, X-ray photoelectron spectroscopy (XPS).

Keywords