Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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Characteristics of Particle Deposition onto Cleanroom Wall Panel for Varying Particle Charging Rates

입자하전량에 따른 클린룸 수직벽체로의 입자침착 특성

  • Kim, Jong-Jun (Graduated School of Mechanical Engineering, University of Seoul) ;
  • Noh, Kwang-Chul (Yonsei University) ;
  • Sung, Sang-Chul (Graduated School of Mechanical Engineering, University of Seoul) ;
  • Baek, Sun-Ho (Graduated School of Industry of Mechanical Engineering, University of Seoul) ;
  • Oh, Myung-Do (Department of Mechanical and Information Engineering, University of Seoul)
  • 김종준 (서울시립대학교 대학원 기계정보공학과) ;
  • 노광철 (연세대학교 기계정보공학부) ;
  • 성상철 (서울시립대학교 대학원 기계정보공학과) ;
  • 백선호 (서울시립대학교 산업대학원 기계정보공학과) ;
  • 오명도 (서울시립대학교 기계정보공학과)
  • Published : 2008.06.25
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Abstract

In this study, we found out charged particle's deposition characteristic by experiments of $0.5{\mu}m$, $1.0{\mu}m$, $3.0{\mu}m$ size particle's concentration decay. We carried out the experiments on charged particle deposition onto the vertical cleanroom wall panel and some other fundamental experiments. The particle deposition mechanism is consist of sedimentation, convection, diffusion, thermophoresis, electrostatic and so on. Particle size determines mainly working deposition mechanism. The charged particle is made with corona discharge that are constituted field charging and diffusion charging. In addition, this combinational mechanism is called combined charging. The type of corona discharge determines quantity of particle electrical charge. In conclusion, we assumed that quantity of particle electrical charge accelerations deposition velocity onto the vertical cleanroom wall panel and proved it. And we figured out particle's deposition characteristic through compared between our experiment's results.

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