Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
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Surface Morphological Evolution during Chemical Dry Etching of Crystalline Si using F radicals and NO Gas

  • Ahn, J.H. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
  • Heo, W. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
  • Jung, C.R. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
  • Lee, N.E. (School of Advanced Materials Science& Engineering, SungKyunKwan University)
  • Published : 2009.05.27
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