한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Transparent Conductive AGZO-PET Film by Roll-to-Roll Sputter and Its Application to Resistive Type Touch Panel Fabrication

  • Lee, Sang-Ju (Dept. of Polymer Science, Kyungpook Nat. Univ.) ;
  • Lee, Sang-Mun (Advanced Display Manufacturing Research Center, Kyungpook Nat. Univ.) ;
  • Lee, Yoon-Su (Advanced Display Manufacturing Research Center, Kyungpook Nat. Univ.) ;
  • Kim, Tae-Hoon (Mobile Display Research Center, Kyungpook Nat. Univ.) ;
  • Park, Lee-Soon (Dept. of Polymer Science, Kyungpook Nat. Univ.)
  • Published : 2009.10.12
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Abstract

High performance resistive type touch panel was fabricated on flexible polyethylene terephthalate (PET) substrates coated with Al- and Ga-codoped ZnO (AGZO) films. The AGZO films were deposited by roll-to-roll direct current magnetron sputter at room temperature. The AGZO thin films on PET substrates showed high transparency (> 85 % at 550 nm) and low sheet resistance (450 ${\Omega}$/sq.). These values were similar to those of commercial ITO films used for resistive type touch panel.

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