한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
권호 표지

Continuous Roll-to-Roll(R2R) sputtering system for growing flexible and transparent conducting oxide electrode at room temperature

  • Park, Yong-Seok (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University) ;
  • Jeong, Jin-A (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University) ;
  • Park, Ho-Kyun (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University) ;
  • Kim, Han-Ki (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University)
  • Published : 2009.10.12
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Abstract

We have investigated the characteristics of transparent indium zinc oxide(IZO)/Ag/IZO multilayer electrode grown on polyethylene terephthalate (PET) substrates using a specially designed roll-to-roll sputtering system for use in flexible device are described. By the continuous R2R sputtering of the bottom IZO, Ag, and top IZO layers at room temperature, we were able to fabricate an IZO-Ag-IZO multilayer electrode with a sheet resistance of 6.15 ${\Omega}$/square, optical transmittance of 87.4 %, and figure of merit value of 42.03 10-3 ${\Omega}$-1. In addition, the IZO-Ag-IZO multilayer electrode exhibited superior flexibility to the RTR sputter grown single ITO electrode, due to the existence a ductile Ag layer between the IZO layers. This indicates that the RTR sputtered IZO-Ag-IZO multilayer is a promising flexible electrode that can substitute for the conventional single ITO electrode grown by bath type sputtering for use in low cost flexible device, due to its low resistance, high transparency, superior flexibility and fast preparation by the R2R process.

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