한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.206-206
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- 2010
신경망을 이용한 PECVD 공정변수에 따른 SiNx 박막의 특성 예측
Prediction of SiNx Thin Film Properties dependent on PECVD Process Parameter Using Neural Network Modeling
- Kim, Eun-Young (Sejong University) ;
- Yon, Sung-Yean (Sejong University) ;
- Kim, Byun-Whan (Sejong University) ;
- Kim, Jeong (Sejong University)
- 발행 : 2010.06.16