한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.351-351
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- 2010
AFM Scratching 기법을 이용한 4H-SiC기판상의 Al 박막 초미세 패턴 형성 연구
Nano-scale Patterning of Al thin film on 4H-SiC using AFM tip Scratching
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Ahn, Jung-Joon
(Kwangwoon University)
;
- Kim, Jae-Hyung (Kwangwoon University) ;
- Park, Yea-Seul (Kwangwoon University) ;
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Koo, Sang-Mo
(Kwangwoon University)
- 발행 : 2010.06.16
초록
Nanoscale patterning using an atomic force microscope tip induced scratching was systematically investigated in AI thin film on 4H-SiC. To identify the effects of the scratch parameters, including the tip loading force, scratch speed, and number of scratches, we varied each parameters and evaluated the major parameter which has intimate relationship with the scale of patterns. In this work, we present the successful demonstration of nano patterning of Al thin film on a 4H-SiC substrate using an AFM scratching and evaluated the scratch parameters on Al/4H-SiC.