한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.388-388
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- 2010
비휘발성 메모리 응용을 위한 VF2-TrFE 박막의 제작 및 특성
Fabrications and Properties of VF2-TrFE Films for Nonvolatile Memory Application
- 정상현 (청주대학교 반도체공학과) ;
- 변정현 (청주대학교 반도체공학과) ;
- 김현준 (청주대학교 반도체공학과) ;
- 김지훈 (청주대학교 반도체공학과) ;
- 김광호 (청주대학교 반도체공학과)
- Jeong, Sang-Hyun (Dept. of Semiconductor Eng., Cheongju University) ;
- Byun, Jung-Hyun (Dept. of Semiconductor Eng., Cheongju University) ;
- Kim, Hyun-Jun (Dept. of Semiconductor Eng., Cheongju University) ;
- Kim, Ji-Hun (Dept. of Semiconductor Eng., Cheongju University) ;
- Kim, Kwang-Ho (Dept. of Semiconductor Eng., Cheongju University)
- 발행 : 2010.06.16
초록
In this study, Ferroelectric vinylidene fluoride-trifluoroethylene (VF2-TrFE) copolymer films were directly deposited on degenerated Si (n+,