Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.08a
- /
- Pages.150-150
- /
- 2011
Electron-neutral Collision Frequency Measurement Using Cutoff Method
- Yu, Gwang-Ho ;
- Kim, Dae-Ung ;
- Na, Byeong-Geun ;
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Jang, Hong-Yeong
;
-
Yu, Sin-Jae
;
-
Kim, Jeong-Hyeong
;
-
Seong, Dae-Jin
;
-
Sin, Yong-Hyeon
- 유광호 (한국과학기술원) ;
- 김대웅 (한국과학기술원) ;
- 나병근 (한국과학기술원) ;
-
장홍영
(한국과학기술원)
;
-
유신재
(표준과학연구원)
;
-
김정형
(표준과학연구원)
;
-
성대진
(표준과학연구원)
;
-
신용현
(표준과학연구원)
- Published : 2011.08.17
Abstract
Electron-neutral collision frequency is one of the important parameters in the plasma physics. Recently, It is employed to monitor the plasma processing in industrial plasma engineering [1]. Using the wave-cutoff probe with network analyzer, the plasma impedance was measured in inductively coupled argon plasma and analyzed to determine the resonance frequency. The electron-neutral collision frequency is directly calculated from the resonance frequency. The calculated electron-neutral collision frequency is good agree with reference which is calculated by measured EEDF using single langmuir probe (SLP).