Synthesis of Few-layer Graphene Film on a Ni Substrate by Using Filtered Vacuum Arc Source Method

  • 김창수 (재료연구소 융합공정연구본부, 부산대학교 하이브리드 소재) ;
  • 서지훈 (재료연구소 융합공정연구본부, 부산대학교 하이브리드 소재) ;
  • 강재욱 (재료연구소 융합공정연구본부, 부산대학교 하이브리드 소재) ;
  • 김도근 (재료연구소 융합공정연구본부, 부산대학교 하이브리드 소재) ;
  • 김종국 (재료연구소 융합공정연구본부, 부산대학교 하이브리드 소재) ;
  • 이형우 (부산대학교 하이브리드 소재 솔루션 국가핵심연구센터)
  • Published : 2011.08.17

Abstract

Graphene has generated significant interest in the recent years as a functional material for electronics, sensing, and energy applications due to its unique electrical, optical, and mechanical properties. Much of the considerable interest in graphene stems from results obtained for samples mechanically exfoliated from graphite. Practical applications, however, require reliable and well-controlled methods for fabrication of large area graphene films. Recently high quality graphene layers were fabricated using chemical vapor deposition (CVD) on nickel and copper with methane as the source of the carbon atoms. Here, we report a simple and efficient method to synthesize graphene layers using solid carbon source. Few-layer graphene films are grown using filtered vacuum arc source (FVAS) technique by evaporation of carbon atom on Ni catalytic metal and subsequent annealing of the samples at 800$^{\circ}$C. In our system, carbon atoms diffuse into the Ni metal layer at elevated temperatures followed by their segregation as graphene on the free surface during the cooling down step as the solubility of carbon in the metal decrease. For a given annealing condition and cooling rate, the number of graphene layers is easily controlled by changing the thickness of the initially evaporated amorphous carbon film. Based on the Raman analysis, the quality of graphene is comparable to other synthesis methods found in the literature, such as CVD and chemical methods.

Keywords