Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effects of Catalysts on Properties of Sol-Gel Derived $PbTiO_3$ Thin Film

$PbTiO_3$ 졸-겔 박막의 특성에 미치는 촉매의 영향

  • 김승현 (한국과학기술원 세라믹스연구부) ;
  • 김창은 (연세대학교 세라믹공학과) ;
  • 정형진 (한국과학기술원 세라믹스연구부) ;
  • 오영제 (한국과학기술원 세라믹스연구부)
  • Published : 1996.07.01
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Abstract

The effect of catalysts which was catalyzed by acid($HNO_3$) and base ($NH_4OH$) or not on the surface microst-ructures and consequent dielectric characteristics of the $PbTiO_3$ thin films prepared by sol-gel method were investigated. The result indicated that bse catalyst promoted the phase transformation of perovskite phase while acid catalyst was found to produce most uniform surface microstructure and improved dielectric properties However degradation of properties due to secondary phase formation and non-uniform microstructure at high annealing temperature (>75$0^{\circ}C$) by rapid diffusion of lead was unavoidable in any case as long as $Si_{(100)}$ \ $SiO_2$ \Pt substrate used.

Sol-gel법으로 제조한 $PbTiO_3$ 세라믹스 박막의 결정화거동, 미세구조 및 유전특성에 있어서 무촉매, 산성촉매 및 염기성촉매가 미치는 영향에 관하여 연구하였다. 열처리온도에 따른 페로브스카이트로의 상전이는 염기성 촉매를 첨가하였을 때가 가장 빨랐으며, 미세구조의 균일성 및 유전특성은 $HNO_3$ 산성촉매를 사용하였을 때가 가장 우수하였다. 그러나, 촉매에 관계없이 $Si_{(100)}$ \ $SiO_2$ \Pt 기판을 사용하였을 때에는 75$0^{\circ}C$ 이상의 고온에서 Pb의 휘발이 급격하게 일어나 제 2상의 생성 및 미세구조가 불균일하게 번화함으로써 물성저하를 피할 수 없었다.

Keywords

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