A Study on the Coating Fracture in Silicon Nitride Bilayer : II. Effect of Coating Thickness

질화규소 이층 층상재료에서 코팅층의 파괴에 관한 연구 : II Coating Thickness의 영향

  • 이기성 (한국과학기술원 재료공학과) ;
  • 이승건 (미국표준과학연구소) ;
  • 김도경 (한국과학기술원 재료공학과)
  • Published : 1998.01.01

Abstract

The effect of coating thickness on the contact fracture was studied, in Si3N4 coated Si3N4-BN system When the elastic/plastic mismatch is relatively large betwen two layers in bilayer certain critical coating thickness was required to prevent cone crack initiation and this critical thickness was decreased by de-creasing the elastic/plastic mismatch,. In addition the required critical thickness should be increased when higher loads apply. In conclusion an appropriate coating thickness should be designed by elastic/plastic mismatch between two layers and environment (applied load) to prevent the coating fracture

Part I에 이어서 질화규소로 코팅된 질화규소-질화붕소 시스템에 있어서 접촉하중에 의한 코팅층의 파괴에 대한 코팅층의 두께의 영향을 고찰하였다. 코팅층과 기판층간의 elastic/plastic mismatch가 큰 경우 코팅층의 균열생성을 방지하는 어느 임계 두께가 존재한다는 사실을 발견하였으며, mismatch가 감소할수록 이러한 요구 임계두께가 감소하였다. 또한 가해진 하중이 증가할수록 요구 임계두께는 증가하여야 함을 알 수 있었다. 따라서 코팅층의 파괴를 방지하기 위해서는 코팅층과 기판층간의 mismatch와 사용환경(가해지는 하중)을 고려한 적정 임계두께늬 설계가 요구된다.

Keywords

References

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