The State of Art in Nano-Force Standards and Measurement

나노 힘 측정표준의 국제 연구동향

  • Park, Yon-Kyu (Korea Reserch Institute of Standards and Science) ;
  • Kang, Dae-Im (Korea Reserch Institute of Standards and Science) ;
  • Kim, Jong-Ho (Korea Reserch Institute of Standards and Science)
  • Published : 2002.03.01

Abstract

Keywords

References

  1. D.B. Newell, J.R. Pratt, J.A. Kramar, D.T. Smith, L.A. Feeney and E.R. Williams, 'Si Traceability of Force at the Nano Newton Level,' 2001 NCSL International Workshop & Symposium, 2001
  2. W. Hoffmann, S. Loheide, T. Kleine-Besten, U. Brand and A. Schlachetzki, 'Methods of Characterising Micro Mechanical Beams and its Calibration for the Application in Micro force Measurement System,' Proc. of the MICRO rec 2000 Conference, pp. 819-823, 2000
  3. L. Doering and U. Brand, 'Si-Cantilevers with Integrated Piezo Resistive Elements as Micro Force Transfer Standards,' Pro. Nanoscale 2001, 2001