Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Precision in situ Measurement using Non-Contacting Capacitive Sensor with 4-Electrodes

비접촉식 4-전극형 전기용량 센서를 이용한 in situ 정밀측정

  • Kim, Jae-Yeol (Department of mechanical Engineering, Chowun university) ;
  • Lee, Lae-Duck (Korea Reserch Institute of Standards and Science) ;
  • Park, Ki-Hyung ;
  • Ma, Sang-Dong (Dept.of Precision Mechanical Engineering, Graduate School of Chosun University) ;
  • Yang, Dong-Jo (Dept.of Precision Mechanical Engineering, Graduate School of Chosun University)
  • 김재열 (조선대학교 공과대학 기계공학부) ;
  • 이래덕 (한국표준과학연구원) ;
  • 박기형 (조선이공대학 컴퓨터응용기계학부) ;
  • 마상동 (조선대학교 대학원 정밀기계공학과) ;
  • 양동조 (조선대학교 대학원 정밀기계공학과)
  • Published : 2002.03.01
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Abstract

To establish the national standard of capacitance, four main electrodes of the cross capacitor which were evaluated to linearity and roundness less the $\pm 1 \mu m$ respectively have to be adjusted symmetrically in an inner cylinder. Four LM shafts with diameter of 5 mm were installed between main electrodes of the cross capacitor, and the electrodes were adjusted, as the first step, by means of the measured capacitance. In the second step, the symmetrical adjustment up to $\pm 1.2\mu m$ was performed by using a ball sensor, ball-type movable sensor, non-contacting capacitive sensor and upper guard sensor which were developed in this project.

Keywords

References

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