Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

A Newly Designed Contact Profiler for Microstructure

새로운 구조의 접촉식 미세구조 프로필러

  • Choi, Dong-Jun (LG Electronics) ;
  • Choi, Jai-Seong (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Choi, In-Mook (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 최동준 (LG전자기술원 소자재료연구소) ;
  • 최재성 (한국과학기술원 기계공학과) ;
  • 최인묵 (한국과학기술원 기계공학과) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Published : 2002.03.01
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Abstract

A simple and low cost stylus profiler made of ferrite cores is developed. The devised profiler consists of a contact probe, a measuring transducer, a signal processing unit, and a motorized stage. The contact probe attached to 4-bar spring maintains sufficient stiffness to protect disturbances. An overlap-area type inductive position sensing system is selected as a measuring transducer, which has high sensitivity, repeatability and linearity. The transducer is composed of coil bundles and ferrite cores which have good electromagnetic characteristics in spite of low cost. The repeatability of the profiler with the proposed inductive sensing system is better than 50nm. Experimental results are shown that the proposed profiler can measure the line or 3D profile of an object with sub-micron features.

Keywords

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