DOI QR코드

DOI QR Code

The variation of optical pass length between incident and reflective beam in multilayer thin film

다층박막에서의 입사광과 반사광의 광로정변화

  • 김문환 (신라대학교 공과대학 자동차기계공학과) ;
  • 최영규 (신라대학교 공과대학 광전자공학과)
  • Published : 2002.12.01

Abstract

The variation of the optical pass length between incident and reflective beam in a multilayer thin film reflection mirror is investigated. This variation is caused mainly by environmental parameters around the optical system, such as the air pressure, temperature, humidity and $CO_2$concentration. In this paper, a new method for measuring optical pass length variation is proposed. This optical pass length is measured against the above parameters by experiment. From the experimental results, it is clarified that the optical pass length is mostly effected by humidity changes.

광학 반사경에서 일어나는 입사광과 반사광의 광로정변화와 분위기변화와의 관계를 조사했다. 분위기 변화요소로는 기압, 온도, 습도 그리고 $CO_2$함유량 등을 예로 들었다. 이들의 변화에 따른 광로정 변화치의 측정기법을 개발하여 실험 결과로부터 광로정 변화치를 정량화할 수 있음을 보였으며. 습도변화가 광로정의 변화에 가장 큰 영향을 미친다는 것을 확인하였다.

Keywords

References

  1. 한국광학회지 v.11 no.5 두 파장 백색광 간섭계를 이용한 금속물질의 단차측정 박민철;김승우
  2. J. Moncrystalline Solids v.218 Optical measurements and modeling of an all solid state inorganic thin film electrochromic system G. Macrelli;E. Poli;H. Demiryont;R. Gotzelmann https://doi.org/10.1016/S0022-3093(97)00204-4
  3. Extended Abstracts, The 49th Autumn Meeting, The Japan Society of Applied Phisics no.3 Study of optical change on metal surface H. Matsumoto
  4. Ph.D. Thesis, Newcastle upon Tyne Polytechnics S. Ogura
  5. Thin Solid Films v.34 Water sorption phenomena in optical thin films S. Ogura;H. A. Macleod https://doi.org/10.1016/0040-6090(76)90497-1
  6. Thin film optical filters H. A. Macleod
  7. Jpn. J. Appl. Phys. v.37 no.4A Double optical phase transition of GeSbTe thin films sandwiched between two SiN layers J. Tominaga;T. Nakano;N. Atoda https://doi.org/10.1143/JJAP.37.1852
  8. Materials Characterization and Optical Probes Techniques, SPIE Proc. v.CR69 Photothermal sensing techniques for thin-film characterization Z. L. Wu
  9. j.vAC. v.60 Spectroscopic ellipsometry of multilaye dielectric coatings D. Bhattacharyya;N. K. Sahoo;S. Thakur;N. C. Das https://doi.org/10.1016/S0042-207X(00)00222-0
  10. Optical review v.6 no.1 Direct Monitoring of Thickness and Refractive Index of Optical Thin Film Deposited on Fiber End-face Y. Suzuki;S Nagaoka;Y Uenishi https://doi.org/10.1007/s10043-999-0077-5
  11. 한국광학회 v.11 no.3 이온 보조 증착한 $Ta_2O_5$ 광학 박막의 광학적 및 기계적 특성 분석 류태욱;김동진;김석원;한성홍