Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
권호 표지

Characteristics of diamond-like nanocomposite films grown by plasma enhanced chemical vapor deposition

플라즈마 화학기상증착에 의해 성장된 유사 다이아몬드 나노복합체 박막의 특성 평가

  • 양원재 (한양대학교 세라믹공정연구센터) ;
  • 오근호 (한양대학교 세라믹공정연구센터)
  • Published : 2003.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

The diamond-like nanocomposite (DLN) thin films were deposited on Si substrates using $CH_4/(C_2H_5O)_4Si/H_2$/Ar gas mixtures as source gases by the plasma enhanced chemical vapor deposition (PECVD). The chemical structure and microstructure of grown films were investigated and their tribological properties were evaluated by a ball-on-plate type tribometer. The deposited DLN films mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The DLN films had a good agreement with tribological coating applications due to their extremely low friction coefficients and low wear rates.

$CH_4/(C_2H_5O)_4Si/H_2$/Ar가스 혼합물을 출발 반응원료로 하여 플라즈마 화학기상증착법으로 Si 기판 위에 유사 다이아몬드 나노복합체(diamond-like nanocomposite, DLN) 박막을 증착하였다. 성장된 막의 화학구조와 미세구조를 확인하였으며 막의 마모특성을 평가하였다. 증착된 DLN 막은 다이아몬드와 유사한 a-C:H 구조와 실리카와 유사한 a-Si:O 구조가 네트워크 형태로 구성되어 있음을 확인하였으며 극도로 낮은 마모계수와 마모속도를 나타내어 내마모 코팅용 보호막으로 의 응용에 적합한 것으로 나타났다.

Keywords

References

  1. Pure & Appl. Chem. v.66 Diamond-like carbon J. Robertson https://doi.org/10.1351/pac199466091789
  2. J. Appl. Phys. v.84 Mechanical Properties of Ti-containing and W-containing Diamond-like Carbon Coatings W.J. Meng;B.A. Gillispie https://doi.org/10.1063/1.368650
  3. Surf. Coat. Technol. v.73 Tribological Characteristics of DLC Films and Euplex Plasma Nitriding/DLC Coating Treatments E.I. Meletis;A. Erdemir;G.R. Fenske https://doi.org/10.1016/0257-8972(94)02375-1
  4. Thin Soild Films v.280 Mechanical Properties of a-C : H/SiOx Nanocmposite Thin Films Prepared by Ion-assisted Plasma-enhanced Chemical Vapor Deposition J.H. Lee;D.S. Kim;Y.H. Lee;B. Farouk https://doi.org/10.1016/0040-6090(95)08202-6
  5. Surf. Coat. Technol. v.111 Thermal Stability of Diamond-like Carbon Films with Added Silicon W.-J. Wu;M.-H. Hon https://doi.org/10.1016/S0257-8972(98)00719-1
  6. Mater. Sci. Eng. v.B 11 Influence of Silicon on the Physical Properties of Diamond-like Films F. Demichelis;C.F. Pirri;A. Tagliaferro
  7. Thin Soild Films v.212 Diamond-like Nanocomposited (DLN) V.F. Dorfman https://doi.org/10.1016/0040-6090(92)90532-G
  8. Thin Soild Films v.270 Characterization of Ion-beam-deposited Diamond-like Carbon Films V. Palshin;E.I. Meletis;.S. Ves;S. Logothetidis https://doi.org/10.1016/0040-6090(95)06912-7
  9. J. Vac. Sci. Tehcnol. v.A 12 Amorphous Nitrogenated Carbon Films: Structural Modifications Induced by Thermal Annealing F.L. Freire;C.A. Achete;G. Mariotto;R. Canteri
  10. Thin Soild Films v.116 Thermal Annealing Study of Carbon Films Formed by the Plasma Decomposition of Hydrocarbons M.P. Nadler;T.M. Donovan;A.K. Green https://doi.org/10.1016/0040-6090(84)90441-3
  11. J. Chem. Phys. v.53 Raman Spectrum of Graphite F. Tuinstra;J.L. Koenig https://doi.org/10.1063/1.1674108
  12. Phys. Rev. v.B 29 Use of Raman Scattering to investigate Disorder and Crystallite Formation in As-deposited and Annealed Carbon Films R.O. Dillon;J.A. Woollam
  13. Phys. Rev. v.B 35 Electrical and Atomic Structure of Amorphous Carbon J. Robertson;E.P. O'Reilly
  14. J. Appl. Phys. v.71 Effects of Substrate Temprature on Chemical Structure of Amorphous Carbon Films N.H. Cho;D.K. Veirs;J.W. Ager Ⅲ;M.D. Rubin;C.B. Hopper;D.B. Bogy https://doi.org/10.1063/1.351122
  15. Phys. Rev. v.B 30 Modeling Studies of Amorphous Carbon D. Beeman;J. Silverman;R.Lynds;M.R. Anderson
  16. Suft. Coat. Technol. v.115 Tribological Properties of Diamond-like Nanocomposite Coatings at High Temperature C. Venkattaman;C. Brodbeck;R. Lei https://doi.org/10.1016/S0257-8972(99)00241-8