Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Finite Element Analysis of Nano Deformation for the Hyper-Fine Pattern Fabrication by using Nanoindentation

나노인덴테이션을 이용하여 극미세 패턴을 제작하기 위한 나노 변형의 유한요소해석(I)

  • 이정우 (부산대학교 대학원 정밀기계공학과) ;
  • 윤성원 (부산대학교 정밀기계공학과) ;
  • 강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소)
  • Published : 2003.05.01
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Abstract

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and pile-up was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0mm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

Keywords

References

  1. Oliver, W. C., Pharr, G. M., 'An Improved Technique for Determining Hardness and Elastic Modulus using Load and Displacement Sensing Indentation Experiments,' J. Mater. Res., Vol. 7, No. 6, pp. 1564-1583, 1992 https://doi.org/10.1557/JMR.1992.1564
  2. Han, J. H., Lee, K. R., Kim, K. S., Lee S. Y., 'Principal and Applications of Nanoindentation Test,' J. KSPE, Vol. 19, No. 3, pp. 19-26, 2002
  3. Menz, W., 'LIGA and Related Technologies for Industrial Application,' Sensor. Actuat. A-phys., Vol. 54, pp. 785-789, 1997 https://doi.org/10.1016/S0924-4247(97)80056-8
  4. Sung, I. H., Kim, J. S., Kim, D. E., 'Non-lithography Micro-structure Fabrication Technology and Its Application,' J. KSPE, Spring, pp. 956-959, 2002
  5. Ashida, K., Morita, N. and Toshida, Y., 'Study on Nano-machining Process using Mechanism of a Friction Force Microscope,' JSME International Journal Series C, Vol. 44, No. 1, pp. 51-60, 2001 https://doi.org/10.1299/jsmec.44.244
  6. Minne, S. C., Adams, J. D., Yaralioglu, G., Manalis, S. R., Atalar, A. and Quate, C. F., 'Centimeter Scale Atomic Force Microscope Imaging and Lithography,' Appl. Phys. Lett., Vol. 73, pp. 1742-1744, 1998 https://doi.org/10.1063/1.122263
  7. Hamamaka, H., Ono, T. and Esashi, M., 'Fabrication of Self Supported Si Nano-Structure with STM,' Proc. IEEE MEMS'97, pp. 153-156, 1997 https://doi.org/10.1109/MEMSYS.1997.581791
  8. Snow, E. S., Campbell, P. M., 'Fabrication of Si Nanostructure with an Atomic Force Microscope,' Appl. Phys. Lett., Vol. 64, pp. 1932-1934, 1994 https://doi.org/10.1063/1.111746
  9. MTS, Nanoindenter XP Manual, 2002
  10. Lu, Chung-Jen, Bogy, D. B., 'The Effect of Tip Radius on Nano-indentation Hardness Tests,' Int. J. Solid Structures, Vol. 32, No. 12, pp. 1759-1770, 1995 https://doi.org/10.1016/0020-7683(94)00194-2
  11. Gad-el-Hak, M., The MEMS Handbook, CRC PRESS, pp. 18-11, 12, 2001
  12. Hibbitt, Karlsson and Sorensen, ABAQUS Standard/Explicit rel. 6.2, 2001
  13. Lichnichi, M., Lenardi, C., Haupt, J., Vitali, R. 'Simulation of Berkovich Nanoindentation Experiments on Thin Films using Finite Element Method,' Thin Solid Films, Vol. 333, pp. 278-286, 1998 https://doi.org/10.1016/S0040-6090(98)01263-2