Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Finite Element Analysis of Nanoindentation Process and its Experimental Verification

나노 인덴테이션 공정의 유한요소해석 및 실험적 검증

  • 이정우 (부산대학교 대학원 정밀기계공학과) ;
  • 윤성원 (부산대학교 대학원 정밀기계공학과) ;
  • 강충길 (부산대학교 기계공학부 정밀정형 및 금형가공 연구소)
  • Published : 2003.07.01
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Abstract

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behaviors of the materials during indentation were studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparisons between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test.

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References

  1. Proc. of 2nd euspen Int. Conf. New Maskless micro-fabrication technique of single-crystal silicon using the combination of nanometer-scale machining and wet Etching Ashida,K.;Chen,L.;Morita,N.
  2. Jpn, Prec. Eng. v.66 no.11 Maskless pattern formation which used alkaline etching and nano-scale cutting by using friction force microscope Chen,L.;Morita,N.;Ashida,K.
  3. 한국정밀공학회지 v.20 no.5 나노인덴테이션을 이용하여 극미세 패턴을 제작하기 위한 나노변형의 유한요소해석 이정우;윤성원;강충길
  4. J. Appl. Phy. v.85 no.3 Finite-element modeling of nanoindertation J.A.Knapp;D.M.Follstaedt;S.M.Myers;J.C.Barbour;T.A.Friedmann https://doi.org/10.1063/1.369178
  5. ABAQUS Standard/Explicit rel. 6.2. Hibbitt;Karlsson;Sorensen
  6. Int. J. Solid Struct v.32 no.12 The effect of tip radius on nano-indentation hardness tests Lu,C.J.;Bogy,D.B. https://doi.org/10.1016/0020-7683(94)00194-2
  7. Thin Solid Films v.333 Simulation of Berkovich nanoindentation experiments on thin films using finite element method Lichnichi,M.;Lenardi,C.;Haupt,J.;Vitali,R https://doi.org/10.1016/S0040-6090(98)01263-2