Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Structural, Optical and Electrical Properties of ZnO Thin Films with Zn Concentration

Zn 농도변화에 따른 ZnO 박막의 구조, 광학 및 전기적 특성 연구

  • 한호철 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 김익주 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 태원필 (인하대학교 소재연구소) ;
  • 김진규 ((주)서울정광) ;
  • 심문식 ((주)서울정광) ;
  • 서수정 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 김용성 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터)
  • Published : 2003.11.01
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Abstract

We used isopropanol which has low boiling point to prepare thin films at low temperature and changed mole concentration of zinc acetate from 0.3 to 1.3 mol/l. The structural, optical and electrical properties of ZnO thin films with Zn content were investigated. ZnO thin films highly oriented along the c-axis were obtained at Zn concentration of 0.7 mol/l. ZnO thin films with Zn concentration of 0.7 mol/l showed a homogeneous surface layer of nano structure. The transmittance of ZnO thin films by UV-vis. measurement was about 87% under the Zn concentration of 0.7 mol/l, but rapidly decreased over the 1.0 mol/l. The optical band gap energy was obtained from 3.07 to 3.22 eV which is very close to the band gap of bulk ZnO (3.2 eV). The electrical resistivity of ZnO thin films was about 150 $\Omega$-cm that shows little difference with Zn concentration. I-V curves of ZnO thin films exhibited typical ohmic contact properties.

저온 박막 공정을 위해 비등점이 낮은 용매인 isopropanol을 사용하였고, 용질로 zinc acetate의 몰 농도를 0.3∼1.3 mol/l까지 변화시켜 sol을 합성하였다. Zn 농도 변화에 따른 ZnO 박막의 구조 및 광학, 전기적 특성을 분석하였다. XRD 측정에서 Zn의 농도가 0.7 mol/l 일 때 c-축으로 결정 배향성이 뚜렷하였다. SEM으로 박막의 표면 morphology를 관찰한 결과 0.7 mol/l 에서 균일한 표면층을 갖는 나노구조를 이루고 있었다. UV-vis. 측정을 통한 ZnO 박막의 광투과도는 Zn의 농도가 0.7 mol/l 이하에서 87%였으나, 1.0 mol/l 이상의 농도에서는 급격히 감소하였다. 이때 광 밴드갭 에너지는 3.07∼3.22 eV의 값을 나타내며, 벌크 ZnO의 특성과 유사하였다. 박막의 전기 비저항 값은 150 $\Omega$-cm로 Zn의 농도변화에 따라 큰 변화를 보이지 않았으며, I-V 특성분석에서 전형적인 ohmic contact 특성을 보였다.

Keywords

References

  1. Appl. Phys. Lett. v.39 no.8 Transparent and Highly Conductive Films of ZnO Prepared by RF Reactive Magnetron Sputtering J.B.Webb;D.f.Williams;M.Buchanan https://doi.org/10.1063/1.92815
  2. J. Vac. Sci. Technol. v.A1 no.2 High Rate Planar Magnetron Deposition of Transparent Conducting, and Heat Reflecting Films on Glass and Plastic M.J.Brett;R.W.McMahon;J.Affinito;R.R.Parsons
  3. Thin Solid Fimls v.246 Aluminium Content Dependence of Milky Transparent Conducting ZnO:Al Films with Textured Surface Prepared by D.C. Magnetron Sputtering H.Sato;T.Minami;Y.Tamura;S.Takata;T.Mori;N.Ogawa https://doi.org/10.1016/0040-6090(94)90736-6
  4. J. Appl. Phys. v.51 no.8 Photovoltaic Properties of ZnO/CdTe Heterojunction Prepared by Spray Pyrolysis J.A.Aranovich;D.Golmayo;A.L.Fehrenbruch;R.H.Bube https://doi.org/10.1063/1.328243
  5. Thin Solid Films v.164 Reactively Sputtered ZnO:A1 Films for Energy-effcient Windows Z.C.Jin;I.Hamberg;C.G.Granqvist;B.E.Sernelius;K.F.Berggren https://doi.org/10.1016/0040-6090(88)90166-6
  6. J. Electrochem. Soc. v.136 no.7 Thick Film ZnO Resistive Gas sensors : Analysis of their Stationary and Kinetic Behanviour S.Pizzini;N.Butta;D.Narducci;M.Palladino https://doi.org/10.1149/1.2097092
  7. J. Appl. Phys. v.44 no.4 Theory of Interdigital Couplers on Nonpiezoelectric Substrates G.S.Kino;R.S.Wagner https://doi.org/10.1063/1.1662397
  8. J. Appl. Phys. v.87 no.7 Plasma Assisted Molecular Beam Epitaxy of ZnO on c-plane Sapphire : Growth and Characterization Y.F.Chen;D.M.Bagnall;H.J.Koh;K.T.Park;K.Hiraga;Z.Zhu;T.Yao
  9. J. Appl. Phys. v.74 no.1 Dual-ion-beam Sputter Deposition of ZnO Films F.Quaranta;A.Valentini;F.R.Rizzi
  10. J. Cryst. Growth v.159 no.1 Preparation of ZnO Films by Spray Pyrolysis A.J.C.Fiddes;K.Durose;A.W.Brinkman https://doi.org/10.1016/0022-0248(95)00707-5
  11. Thin Solid Films v.306 no.1 Sol-gel Preparation of ZnO Films with Extremely Preferred Orientation along(002) Plane from Zine Acetate Solution M.Ohyama;H.Kozuka;T.Yoko https://doi.org/10.1016/S0040-6090(97)00231-9
  12. Thin Solid Films v.312 Sol-gel Derived c-axis Oriented ZnO Thin Films D.Bao;H.Gu;A.Kuang https://doi.org/10.1016/S0040-6090(97)00302-7
  13. Appl. Phys. Lett. v.65 no.23 Characteristics of High Quality ZnO Thin Films Deposited by Pulsed Laser Depositon V.Cracium;J.Elders;J.G.E.Gardeniers https://doi.org/10.1063/1.112478
  14. Thin Solid Films v.295 High Quality Zinc Oxide Films by Pulsed Laser Ablation K.L.Narasimhan;S.P.Pai;V.R.Palkar;R.Pinto https://doi.org/10.1016/S0040-6090(96)09157-2
  15. Appl. Phys. Lett. v.37 no.5 Highly Oriented Zinc Oxide Films Grown by the Oxidation of Diethylzinc S.K.Ghandhi;R.J.Field;J.R.Shealy https://doi.org/10.1063/1.91960
  16. J. Appl. Phys. v.52 no.11 Properties of Zinc Oxide Films Prepared by the Oxidation of Diethyl Zinc A.P.Roth;D.F.Williams https://doi.org/10.1063/1.328618
  17. J. Appl. Phys. v.72 no.9 Low-temperature Conductivity of ZnO Films Prepared by Chemical Vapor Deposition Y.Natsume;H.Sakata;T.Hirayama;H.Yangida https://doi.org/10.1063/1.352231
  18. Appl. Surf. Sci. v.185 In situ RHEED Monitor of the Growth of Epitaxial Anatase TiO₂Thin Films C.K.Ong;S.J.Wang https://doi.org/10.1016/S0169-4332(01)00589-X
  19. Jpn. J. Appl. Phys. v.28 Properties of Aluminum-doped ZnO Thin Films Grown by Electron Beam Evaporation A.Kuroyanagi https://doi.org/10.1143/JJAP.28.291
  20. Sol-gel Science : The Physics and Chemistry of Sol-gel Processing C.J.Brinker;G.W.Scherer
  21. J. Kor. Ceram. Soc. v.33 no.2 Preparation and Characterization of Al-doped ZnO Trasparent Conducting Thin Film by Sol-gel Processing S.M.Hyum;K.H.;B.H.Kim
  22. J. Cryst. Growth v.247 Electrical and Optical Properties of ZnO Transparent Conducting Films by the Sol-gel Method B.O.Park;K.H.Ko;J.H.Lee https://doi.org/10.1016/S0022-0248(02)01907-3
  23. J. Kor. Asso. Cryst. Growth v.11 no.2 Characteristics of caxis Oriented Sol-gel Derived ZnO Films S.S.Kim;K.W.Jang;I.S.Kim
  24. Mater. Chem. Phys. v.78 no.1 Electrical and Optical Properties of Zinc Oxide Films Post-annealed in H₂after Fabrication by Sol-gel Process Y.Natsume;H.Sakata
  25. Thin Solid Films v.372 Zinc Oxide Films Prepared by Sol-gel Spin-Coating Y.Natsume;H.Sakata https://doi.org/10.1016/S0040-6090(00)01056-7
  26. Appl. Surf. Sci. v.158 X-ray Photoelectron Spectroscopy and Auger Electron Spectroscopy studies of Al-doped ZnO Films M.Chen(et al.) https://doi.org/10.1016/S0169-4332(99)00601-7
  27. Mater. Sci. And Eng. v.B103 no.1 Investigations on Solution Derived Aluminium Doped Zinc Oxide Thin Films S.B.Majumder;M.Jain;P.S.Dobal;R.S.Katiyar https://doi.org/10.1016/S0921-5107(03)00128-4
  28. Electronic Processes in Non-crystalline Materials(2nd ed.) N.F.Mott;E.A.Davis
  29. Phys. Stat. Sol. v.A148 no.2 Y.Natsume;H.Sakata;T.Hirayama https://doi.org/10.1002/pssa.2211480217
  30. J. Vac. Sci. Technol. v.16 no.4 Optical and Electrical Properties of ZnO Films Prepared by Spray Pyrolysis for Solar Cell Applications J.Aranovich:A.Oritz;R.H.Bube https://doi.org/10.1116/1.570167
  31. J. Cryst. Growth v.247 Growth of Pure ZnO Thin Films Prepared by Chemcal Spray Pyrolysis on Silicon R.Ayouchi;F.Martin;D.Leinen;J.R.Ramos-Barrado https://doi.org/10.1016/S0022-0248(02)01917-6

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