Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication and Characteristics of Chromel-Constantan Multijunction Thermal Converter with Evanohm R Alloy Heater

Evanohm R 합금 히터를 사용한 크로멜-콘스탄탄 다중접합 열전변환기의 제작 및 특성

  • Lee, Young-Hwa (Department of Material Engineering, Chungnam National University) ;
  • Kwon, Sung-Won (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Kim, Kook-Jin (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Park, Se-Il (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Ihm, Young-Eon (Department of Material Engineering, Chungnam National University)
  • 이영화 (충남대학교 재료공학과) ;
  • 권성원 (한국표준과학연구원 전자기표준부) ;
  • 김국진 (한국표준과학연구원 전자기표준부) ;
  • 박세일 (한국표준과학연구원 전자기표준부) ;
  • 임영언 (충남대학교 재료공학과)
  • Published : 2004.01.30
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Abstract

A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/$^{\circ}C$ and the voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.

Keywords

References

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