Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nano-scratch Process

나노스크래치 공정을 이용하여 극미세 패턴을 제작하기 위한 나노 변형의 유한요소해석

  • 이정우 (부산대학교 대학원 정밀기계공학과) ;
  • 강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소) ;
  • 윤성원 (부산대학교 정밀기계공학과)
  • Published : 2004.03.01
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Abstract

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

Keywords

References

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