한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제21권6호
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  • Pages.153-159
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  • 2004
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

나노 복화공정의 역방향 적층법을 이용한 직접적 나노패턴 생성에 관한 연구

Directly Nano-precision Feature Patterning on Thin Metal Layer using Top-down Building Approach in nRP Process

  • 박상후 (한국과학기술원 기계공학과 대학원) ;
  • 임태우 (한국과학기술원 기계공학과 대학) ;
  • 양동열 (한국과학기술원 기계공학) ;
  • 공홍진 (한국과학기술원 물리학과)
  • 발행 : 2004.06.01
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초록

In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range of several micrometers with nano-scaled details. In the process, liquid-state resins are polymerized by two-photon absorption which is induced by femto-second laser. A thin gold layer was sputtered on a glass plate and then, designed patterns or figures were developed on the gold layer by newly developed top-down building approach. Generally, stamps fur nano-imprinting have been fabricated by using the costly electron-beam lithography process combined with a reactive ion-etching process. Through this study, the effectiveness of the improved nRP process is evaluated to make a stamp with the resolution of around 200nm with reduced cost.

키워드

참고문헌

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