한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제21권6호
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  • Pages.145-152
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  • 2004
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

AFM을 이용한 나노 인덴터 팁의 면적함수 결정에 관한 연구

A Study on Determination of the Area Function of Nano Indenter Tip with AFM

  • 발행 : 2004.06.01
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초록

Depth-sensing indentation is wifely used for evaluation of mechanical properties of thin films. It is generally accepted that the most significant source of uncertainty in nanoindentation measurement is the geometry of the indenter tip. Therefore the successful application of the technique requires accurate calibration of the indenter tip geometry. The direct measurement of geometry of a Berkovich indenter was determined using a atomic force microscope. The indentation geometrical calibration of contact area was performed by analyzing the indenter tip profile. The equations of area functions were proposed for nanoscale thin films..

키워드

참고문헌

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