Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Reliability Assessment of MEMS Gyroscope Sensor

MEMS 자이로스코프 센서의 신뢰성 문제

  • 최민석 (삼성종합기술원 MEMS Lab.) ;
  • 좌성훈 (삼성종합기술원 MEMS Lab.) ;
  • 김종석 (삼성종합기술원 MEMS Lab.) ;
  • 정희문 (삼성종합기술원 MEMS Lab.) ;
  • 송인섭 (삼성종합기술원 MEMS Lab.) ;
  • 조용철 (삼성종합기술원 MEMS Lab.)
  • Published : 2004.09.01
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Abstract

Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

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References

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