한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제22권7호
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  • Pages.38-46
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  • 2005
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

엑사이머 레이저 어블레이션 가공에서의 빔변수의 영향

Effects of Beam Parameters on Excimer Laser Ablation

  • 방세윤 (동국대학교 기계공학과)
  • 발행 : 2005.07.01
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초록

In laser machining such as drilling with $CO_2$ or Nd:YAG laser, and etching or ablation with Excimer laser, one of the most important parameters affecting the machining is known to be beam characteristics. In this paper a numerical study is performed to investigate the effects of beam parameters, especially in the process of excimer laser ablation of polymers. Results of different beam conditions reveal that if the ablated depth is small compared to beam size the simple photochemical etching model is suitable to predict the etched shape, and that the importance of precise alignment becomes large as beam quality factor becomes larger.

키워드

참고문헌

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