한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제22권7호
  • /
  • Pages.79-87
  • /
  • 2005
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

레이저를 이용한 준삼차원 미소형상 가공 모델링

Modeling of Laser Micromachining of Quasi-three-dimensional Shapes

  • 발행 : 2005.07.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper summarizes the work on the development of a simulation program for modelling the process of machining quasi-three dimensional shape with the excimer laser beam on a constantly moving polymers. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses irradiated on the specimen surface. It was found that similar shapes as experimental results can be obtained by choosing suitable parameters of moving velocity, moving distance and mask sizes.

키워드

참고문헌

  1. Duley, W. W., 'UV Lasers - Effects and Applications in Materials Science,' Ch. 5., Cambridge University Press, 1996
  2. Yoon, K. K., Lee, S. K., Kim, J. G., Shin, B. S., Choi, D. S., Whang, K. H. and Park, J. Y., 'Laser Beam Application and Technology in Micro Machining,' J. of KSPE, Vol. 17, No.7, pp. 28-35, 2000
  3. Yoon, K. K., Kim, J. G., Lee, S. K., Choi, D. S., and Whang, K. H., 'Fabrication of Micro Cylindrical Lens Using UV Laser,' 2000 Proc. of 2nd Korean MEMS Conference, pp. 191-195, 2000
  4. Bang, S. Y. and Yoon, K. K., 'Modeling of Polymer Ablation with Excimer Lasers,' submitted to J. of KSPE
  5. Bang, S. Y., 'Effects of Beam Parameters on Excimer Laser Ablation,' J. of KSPE, Vol. 22, No. 7, 2005
  6. Srinivasan, V., Smrtic, M. A. and Babu, S. V., 'Excimer Laser Etching of Polymers,' J. Appl. Phys., Vol. 59, No. 11, pp. 3861-3867, 1986 https://doi.org/10.1063/1.336728
  7. Babu, S. V., D'Couto, G. C. and Egitto, F. D., 'Excimer Laser Induced Ablation of Polyetherether -ketone, Polyimide, and Polytetrafluoroethylene,' J. Appl. Phys., Vol. 72, No.2, pp. 692-698, 1992 https://doi.org/10.1063/1.351855
  8. D'Couto, G. C., Babu, S. V., Egitto, F. D. and Davis, C. R., 'Excimer Laser Ablation of Polyimide-Doped Poly(tetrafluoroethylene) at 248 and 308nm,' J. Appl. Phys., Vol. 74, No. 10, pp. 5972-5980, 1993 https://doi.org/10.1063/1.355210