한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제22권7호
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  • Pages.71-78
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  • 2005
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

변형유기 식각 힐록 현상을 이용한 기계화학적 극미세 Writing 기법에 대한 연구

A Study of Mechanochemical Hyperfine-Writing Technique Using Deformation Induced Etch Hillock Phenomena

  • 강충길 (부산대학교 기계공학부) ;
  • 윤성원 (부산대학교 정밀기계공학과)
  • 발행 : 2005.07.01
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초록

The purpose of this study is to suggest a hyperfine maskless writing technique by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in $50\;wr\%$ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (etching time, normal load, loading .ate, hold-time at the maximum load) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies. Finally, sample characters were written to show the possibility of the application.

키워드

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