JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Investigation of Pyrolyzed Polyimide Thin Film as MEMS Material

  • Naka, Keisuke (The Graduate School of Science and Engineering, Ritsumeikan University) ;
  • Nagae, Hideki (The Graduate School of Science and Engineering, Ritsumeikan University) ;
  • Ichiyanagi, Masao (The Graduate School of Science and Engineering, Ritsumeikan University) ;
  • Jeong, Ok-Chan (Center of Promotion of the COE program, Ritsumeikan University) ;
  • Konishi, Satoshi (Department of Micro System Tech., Faculty of Science and Engineering, Ritsumeikan University)
  • Published : 2005.03.31
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Abstract

Pyrolyzed polyimide is explored in terms of MEMS material. This paper describes chemical, electrical, mechanical properties of pyrolyzed polyimide (PIX-1400) thin film as MEMS material. When polyimide thin film was pyrolyzed at $800^{\circ}C$ for 60 minutes in $N_{2}$ ambient, the residual ratio of pyrolyzed film thickness measured with a surface profiler is about 49 %, and the resistivity is about $2.17{\times}10^{-2}\;{Omega}cm$. From the result of the load-deflection test, the estimated Young's modulus and initial average stress of pyrolyzed polyimide are 67 GPa and 30 MPa, respectively. As one demonstration of MEMS structures of pyrolyzed polyimide, the fabrication method of the microbridge structure is proposed for a micro heater and a resonator.

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