Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Electrostatic 2-axis MEMS Stage for an Application to Probe-based Storage Devices

Probe-based Storage Device(PSD)용 정전형 2축 MEMS 스테이지의 설계 및 제작

  • 백경록 (LG 실트론 기술연구소, 울산대학교 대학원 기계자동차공학과) ;
  • 전종업 (울산대학교 기계자동차공학부)
  • Published : 2005.11.01
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Abstract

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

Keywords

References

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