Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
권호 표지
DOI QR코드

DOI QR Code

Replication of Patterned Media Using Nano-injection Molding Process

패턴드 미디어를 위한 나노 사출 성형 공정에 관한 연구

  • 이남석 (연세대학교 기계공학부) ;
  • 최용 (연세대학교 기계공학부) ;
  • 강신일 (연세대학교 기계공학부)
  • Published : 2005.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by I-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50nm in diameter, 150nm in pitch, and 50nm in depth.

Keywords

References

  1. R. L. White, R. M. H. New, R. F. W. Pease, 1997, Patterned media: a viable route to 50 $Gbit/in^2$ and up for magnetic recording, IEEE Transactions on Magnetics, Vol. 33(1), pp. 990-995 https://doi.org/10.1109/20.560144
  2. T. Aoyama, K. Uchiyama, T. Kagotani, K. Hattori, Y. Wada, S. Okawa, H. Hatate, H. Nishio, I. Sato, 2001, Fabrication and properties of CoPt patterned media with perpendicular magnetic anisotropy, IEEE Transactions on Magnetics, Vol. 37(4), pp. 1646-1648 https://doi.org/10.1109/20.950926
  3. S. Y. Chou, P. R. Krauss, P. J. Renstrom, 1996, Imprint lithography with 25-nanometer resolution, Science, Vol. 272, pp. 85-87 https://doi.org/10.1126/science.272.5258.85
  4. N. Lee, Y. Kim, S. Kang, J. Hong, 2004, Fabrication of metallic nano-stamper and replication of nano-patterned substrate for patterned media, Nano-technology, Vol. 15, issue 8, pp. 901-906 https://doi.org/10.1088/0957-4484/15/8/005
  5. 김영규, 강신일, 2003, 나노패턴 성형을 위한 금속 나노 스탬퍼 제작, 한국소성가공학회 춘계학술대회, p. 481
  6. 배재철, 김영민, 김홍민, 강신일, 2004, 단열층을 이용한 광디스크 기판의 서브 미크론 성형에 대한 수치해석, 한국소성가공학회지, 제13권, 제1호, pp. 39-44
  7. 김종성, 강신일, 2000, 광디스크 기판 성형시 발생하는 복굴절의 최소화를 위한 이론적 연구, 한국소성가공학회지, 제9권, 제2호, pp. 103-111
  8. N. Lee, Y. Kim, S. Kang, 2004, Temperature dependence of anti-adhesion between a stamper with sub-micron patterns and the polymer in nano-moulding processes, J. Phys. D: Appl. Phys. Vol. 37, No. 12, pp. 1624-1629 https://doi.org/10.1088/0022-3727/37/12/006
  9. S. Moon, N. Lee, S. Kang, 2003, Fabrication of a microlens array using mirco-compression molding with an electro formed mold insert, Journal of Micromechanics and Microengineering, Vol. 13(1), pp. 98-103 https://doi.org/10.1088/0960-1317/13/1/314